| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable piezoelectric element. <P>SOLUTION: The piezoelectric element 100 comprises a first electrode 20, a piezoelectric body 30 formed above the first electrode 20, a second electrode 40 formed above the piezoelectric body 30, and a porous body 50 containing at least one metal element composing the piezoelectric body 30. The piezoelectric body 30 has a first portion 32 that has a thickness equal to the distance between the first and second electrodes 20, 40 and is held between the first and second electrodes 20, 40, and a second portion 34 that is continuous to the first portion 32 in the direction perpendicular to the film thickness direction thereof and has a thickness smaller than that of the first portion 32. The porous body 50 is formed between the second portion 34 and the second electrode 40 and has a thickness which decreases gradually as it approaches the first portion 32. <P>COPYRIGHT: (C)2012,JPO&INPIT |
