VAPOR DEPOSITION TEMPERATURE MEASURING DEVICE, AND VAPOR DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition temperature measuring device for accurately and precisely acquiring the temperature of a vapor deposition object during vapor deposition, and a vapor deposition apparatus using it.

SOLUTION: This vapor deposition temperature measuring device includes an electronic temperature sensor having a thermal sensing element for outputting a detection signal according to a heat receiving amount and a storage section for recording an output signal from the thermal sensing element, and a substrate having a through-hole in a vapor deposition surface. The electronic temperature sensor is arranged in the through-hole of the substrate. The vapor deposition apparatus includes the vapor deposition temperature measuring device in a coat dome.

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