| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate mounting stage, a substrate treatment device and a substrate treatment system capable of performing temperature management and temperature control of peripheral edge parts and central parts of substrates independently with precision, respectively. <P>SOLUTION: A substrate mounting stage for mounting the substrates thereon includes: a peripheral edge mounting member on which the peripheral edge parts of the substrates are mounted to perform temperature control; a center mounting member on which the central parts of the substrates are mounted to perform the temperature control; and a support base which supports the peripheral edge mounting member and the center mounting member. In the substrate mounting stage, a gap between the peripheral edge mounting member and the center mounting member is formed, and the peripheral edge mounting member and the center mounting member do not come into contact with each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
