| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent contamination of an edge part of a non-polished surface of a glass substrate by a polishing liquid, and to suck and fix the non-polished surface of the glass substrate to a table well. <P>SOLUTION: An empty table 12 is transported to a liquid spray part 14 along a table transport path. While transporting the table 12 along the table transport path, a dryness preventing liquid is sprayed toward the table 12 from a first nozzle group 22 installed above the table transport path to apply the dryness preventing liquid to a suction region 26 of a non-polished surface of a glass substrate G. A buffering solution is sprayed toward the table 12 from a second nozzle group 30 installed above the table transport path to apply the buffering solution to regions 34A, 34B, 36A, 36B at edge parts of the suction region 26 of the non-polished surface of the glass substrate G. Thereafter, the whole area of the non-polished surface of the glass substrate G is sucked and fixed to the table 12 through the dryness preventing liquid, and all edge parts of the non-polished surface of the glass substrate G is sucked and fixed to the table 12 through the buffering solution. <P>COPYRIGHT: (C)2012,JPO&INPIT |
