发明名称 |
FUSE STRUCTURE HAVING CRACK STOP VOID, METHOD FOR FORMING AND PROGRAMMING SAME, AND DESIGN STRUCTURE |
摘要 |
The disclosure relates generally to fuse structures, methods of forming and programming the same, and more particularly to fuse structures having crack stop voids. The fuse structure includes a semiconductor substrate having a dielectric layer thereon and a crack stop void. The dielectric layer includes at least one fuse therein and the crack stop void is adjacent to two opposite sides of the fuse, and extends lower than a bottom surface and above a top surface of the fuse. The disclosure also relates to a design structure of the aforementioned.
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申请公布号 |
US2012012976(A1) |
申请公布日期 |
2012.01.19 |
申请号 |
US20100838850 |
申请日期 |
2010.07.19 |
申请人 |
GAMBINO JEFFREY P.;LEE TOM C.;PETRUNICH KEVIN G.;THOMAS DAVID C.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GAMBINO JEFFREY P.;LEE TOM C.;PETRUNICH KEVIN G.;THOMAS DAVID C. |
分类号 |
H01L29/86;G06F9/45;H01L21/02;H01L21/326 |
主分类号 |
H01L29/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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