| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diffraction grating with small grids precisely arranged on a curved surface so as to be a large area. <P>SOLUTION: As shown in (A), the pieces of small grids 19a-19d are positioned and joined on a first supporting substrate 31 like a flat plate, and then a second joining substrate 32 is joined thereon to form a joined grating plate 33. As shown in (B), the joined grating plate 33 is sucked by a suction pad 42 for the joined grating plate to curve, and is joined on the concave surface 34a of a concave stage 34. As shown in (C), the convex surface 35a of a convex plane stage 35 is joined on the joined grating plate 33, and the joined grating plate 33 is sandwiched between the concave stage 34 and the convex stage 35. This maintains the curve of the joined grating plate 33. <P>COPYRIGHT: (C)2012,JPO&INPIT |
