| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a carrier system for a suspended pattern hoisting/lowering carriage which comprises annular rails in a plurality of steps and annular rails between the steps associated with the respective in-step annular rails for various types of processing on the surface of a semiconductor substrate (wafer), and wherein the suspended pattern hoisting/lowering carriage running on the inter-step annular rails maintains its smooth running even when the carriage frequently runs between the specific in-step annular rails. Ž<P>SOLUTION: A conveyor system 5 is provided between annular rails 1b and 1e in predetermined different processes, and makes the suspended hoisting/lowering carriage 2 frequently runs therebetween, so that an object (FOUP) 8 to be transported is transferred to and received from the carriage 2 of the in-step annular rails 1b and 1e at both ends of the conveyor system 5. Ž<P>COPYRIGHT: (C)2007,JPO&INPIT Ž</p> |
