| 摘要 |
PURPOSE: A manufacturing method of an organic light emitting display apparatus is provided to eliminate an organic light emitting film while performing an inline process, thereby improving a manufacturing yield. CONSTITUTION: A loading part(710) comprises a first rack(712), an introducing robot(714), an introduction chamber(716), and a first inversion chamber(718). A deposition part(730) comprises a first chamber(731) and a second chamber which are mutually associated. First and second thin film deposition assemblies(100,200) are arranged in the first chamber. Third and fourth thin film deposition assemblies(300,400) are arranged in the second chamber. An electrostatic chuck(600) is sequentially transferred to the loading part, the deposition part, and an unloading part(720).
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