发明名称 |
Method for filtering chemical |
摘要 |
A method for filtering a chemical in which a first chemical stored in a first tank is filtered by a filter and a second chemical obtained by the filtering is stored in a second tank has: adding the capture amounts corresponding to the individual first chemicals first to n-th stored in the first tank, and getting an added capture amount; and comparing the added capture amount and a predetermined limit capture amount of the filter, and exchanging the filter based on the comparison result. |
申请公布号 |
US8097169(B2) |
申请公布日期 |
2012.01.17 |
申请号 |
US20090561768 |
申请日期 |
2009.09.17 |
申请人 |
KAWAMURA YOSHIHISA;AOYAMA HISAKO;MUTOH DAIZO;KABUSHIKI KAISHA TOSHIBA |
发明人 |
KAWAMURA YOSHIHISA;AOYAMA HISAKO;MUTOH DAIZO |
分类号 |
C02F1/00 |
主分类号 |
C02F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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