发明名称 Anti-reflective film and production method thereof, and stamper for producing anti-reflective film and production method thereof
摘要 In this method for producing an anti-reflective film, pores are formed on a surface of a polymer molding material to continuously change a refractive index and then reduce reflectance, in which anodic oxidized porous alumina, in which pores having a tapered shape and whose pore diameter continuously changes, are formed by repeating anodic oxidation at about the same formation voltage and pore diameter enlargement treatment, is used as a mold, or a stamper, which is produced by using the anodic oxidized porous aluminum as a mold, is used as a mold.
申请公布号 US8097479(B2) 申请公布日期 2012.01.17
申请号 US20100732934 申请日期 2010.03.26
申请人 MASUDA HIDEKI;YASUI KENJI;KAWAMOTO YASUSHI;KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY 发明人 MASUDA HIDEKI;YASUI KENJI;KAWAMOTO YASUSHI
分类号 H01L21/00;H01L33/00 主分类号 H01L21/00
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