发明名称 |
Silicide thermal heaters for silicon-on-insulator nanophotonic devices |
摘要 |
A thermally switched Silicon-On-Insulator (SOI) photo electronic device includes a silicon layer including an optical waveguide and a silicide heating element horizontally adjacent to the waveguide. The waveguide has a refractive index that changes with heat applied to the waveguide. |
申请公布号 |
US8098968(B2) |
申请公布日期 |
2012.01.17 |
申请号 |
US20070849591 |
申请日期 |
2007.09.04 |
申请人 |
GREEN WILLIAM MICHAEL JOHN;HAMANN HENDRIK F.;VLASOV YURII A.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GREEN WILLIAM MICHAEL JOHN;HAMANN HENDRIK F.;VLASOV YURII A. |
分类号 |
G02B6/12;G02F1/01 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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