发明名称 |
Method of cleaning support plate |
摘要 |
A method of cleaning a support plate according to which, while no waste solution is produced after cleaning the support plate, the support plate can be treated at low cost. The method of cleaning the support plate includes the step of removing an organic substance adhered to the support plate by putting the support plate in contact with oxygen plasma. |
申请公布号 |
US8097087(B2) |
申请公布日期 |
2012.01.17 |
申请号 |
US20100837790 |
申请日期 |
2010.07.16 |
申请人 |
MITAKE TATSUHIRO;MIYANARI ATSUSHI;INAO YOSHIHIRO;TOKYO OHKA KOGYO CO., LTD. |
发明人 |
MITAKE TATSUHIRO;MIYANARI ATSUSHI;INAO YOSHIHIRO |
分类号 |
B08B5/00 |
主分类号 |
B08B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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