| 摘要 |
PURPOSE: A manufacturing method of a phase difference plate is provided to improve the alignment accuracy in the small process water. CONSTITUTION: The main area(100A) of a metal disk(100) and the reverse pattern of a sub area(100B) are summarily transferred in a base. In the substrate surface, a layer including alignment materials is formed. According to the concavo-convex of the substrate surface, the orientation material is aligned. A patterning phase difference area is formed on the part in which the reversion pattern of the main area is formed. An alignment mark area is formed on a part in which the reverse pattern of sub area is formed'.
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