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发明名称
VERFAHREN ZUR ABSCHEIDUNG EINER OXIDSCHICHT AUF ABSORBERN VON SOLARZELLEN UND VERWENDUNG DES VERFAHRENS
摘要
申请公布号
AT539178(T)
申请公布日期
2012.01.15
申请号
AT20070818560T
申请日期
2007.09.28
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
SITTINGER, VOLKER;RUSKE, FLORIAN;SZYSZKA, BERND
分类号
C23C14/35;H01L31/0224;H01L31/18
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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