| 摘要 |
The present invention relates to a sensor system having nanomaterials applied as resistors in a bridge circuit. The present invention can provide a credible measurement of microscopic changes in the environment by using nanomaterials, which are highly sensitive to changes in the environment. In addition, the present invention can minimize the deterioration of performance of a sensor that occurs with time by using nanomaterilas as resistors in a bridge circuit, which is frequently used in a sensor, and by protecting the area excluding the nanomaterial area from the external environment, wherein the area excluding the nanomaterial areas is buried in a dielectric. Furthermore, the present invention can change the resistance of the nanomaterials by applying voltage on a gate formed on top of the nanomaterials and thus creating an electric field. Therefore, the resistance of the nanomaterials that make up the resistors in a Wheatstone bridge circuit can be set according to the user's intention, and a more credible measurement can be achieved by accordingly correcting the resistance value depending on the deterioration of performance, eliminating changes in a measurement value due to the deterioration of performance or external noise, and allowing the detection and concentration measurement of a substance that corresponds to the resistance value. Also, the present invention integrates a circuit device, which can automatically control the internal equilibrium condition in the Wheatstone bridge circuit, and a single semiconductor chip, which allows automatic correction of an error without requiring a user to set the condition. |
