发明名称 |
METHOD AND APPARATUS FOR EXPOSING A LIQUID CRYSTAL ALIGNMENT LAYER |
摘要 |
PURPOSE: A method for exposing a liquid crystal alignment layer and an apparatus for the same are provided to improve the image quality of a liquid crystal display device and to rapidly form an optical alignment film. CONSTITUTION: A stage unit(110) arranges a substrate with an alignment film and transfers the substrate. A light source(121) emits exposing light. A polarity applying unit applies polarity to the exposing light. A pattern forming unit reflects a part of the exposing light with the polarity to a pattern based on a mirror(123). A projection optical part(125) radiates the pattern of the reflected exposing light to the transferred substrate in order to expose the alignment film. A controlling unit controls entire processes. |
申请公布号 |
KR20120004927(A) |
申请公布日期 |
2012.01.13 |
申请号 |
KR20110063539 |
申请日期 |
2011.06.29 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
YOSHITAKE YASUHIRO;KATAOKA FUMIO;NEMOTO RYOUJI |
分类号 |
G03F7/20;G02F1/13 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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