发明名称 METHOD AND APPARATUS FOR EXPOSING A LIQUID CRYSTAL ALIGNMENT LAYER
摘要 PURPOSE: A method for exposing a liquid crystal alignment layer and an apparatus for the same are provided to improve the image quality of a liquid crystal display device and to rapidly form an optical alignment film. CONSTITUTION: A stage unit(110) arranges a substrate with an alignment film and transfers the substrate. A light source(121) emits exposing light. A polarity applying unit applies polarity to the exposing light. A pattern forming unit reflects a part of the exposing light with the polarity to a pattern based on a mirror(123). A projection optical part(125) radiates the pattern of the reflected exposing light to the transferred substrate in order to expose the alignment film. A controlling unit controls entire processes.
申请公布号 KR20120004927(A) 申请公布日期 2012.01.13
申请号 KR20110063539 申请日期 2011.06.29
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 YOSHITAKE YASUHIRO;KATAOKA FUMIO;NEMOTO RYOUJI
分类号 G03F7/20;G02F1/13 主分类号 G03F7/20
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