| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an elastic wave element capable of manufacturing an elastic wave element with an annular electrode, preventing pyroelectric destruction and capable of reducing steps thereof. <P>SOLUTION: Two or more elastic wave elements are manufactured using the wafer of a piezoelectric substrate. First, an IDT 14x is formed in a substrate area 11 used as an elastic wave element on the wafer, and then short circuit electrodes 14q and 14r for mutually connecting and short-circuiting the electrodes of the IDT 14x are formed in the substrate area 11 and a peripheral area 13 adjacent to the substrate area 11 on the wafer. After cutting a connection part 14z connecting between a part to form the annular electrode 30 and the electrode of IDT 14x enclosed by the part within the short circuit electrodes 14q and 14r, the annular electrode 30 is formed. Then, the wafer is divided and the individual pieces of elastic wave elements are formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
