PLASMA-GENERATING APPARATUS

摘要

A plasma-generating apparatus (30) is provided with a radiofrequency wave-generating device (37) for generating radiofrequency waves and radiofrequency wave radiators (15) for radiating radiofrequency waves outputted from the radiofrequency wave-generating device (37) into a target space (10), and the supplying of radiofrequency wave energy from the radiofrequency wave radiators (15) into the target space (10) generates plasma. The radiofrequency wave-generating device (37) in the plasma-generating apparatus (30) is provided with an oscillator (41) for oscillating radiofrequency waves and amplifiers (42) for amplifying the radiofrequency waves oscillated by the oscillator (41) and outputting the same to the radiofrequency wave radiators (15). Of the oscillator (41) and amplifiers (42) in the radiofrequency wave-generating device (37), only the amplifiers (42) are integrated with the radiofrequency wave radiators (15).