MOCVD SYSTEM HAVING MULTIPLE EPITAXIAL REACTOR CHAMBERS AND OPERATION METHOD THEREOF
摘要
<p>A MOCVD system having multiple epitaxial reactor chambers and an operation method thereof. The system is for use in conducting an epitaxial reaction on several substrates placed on a tray, and comprises a conveyance chamber provided with a mechanical arm, several transfer stations connected to the conveyance chamber, and two or more epitaxial reactor chambers. The epitaxial reactor chambers can conduct simultaneously an epitaxial reaction on the substrates.</p>
