| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of preventing the expansion of damage due to an outflow of liquid, and finely performing exposure processing and measurement processing. <P>SOLUTION: The exposure device (EX) comprises a table (PT) capable of moving, a base member (41) having an upper surface (41A) guiding the movement of the table (PT), and a detection device (60) detecting wether liquid (LQ) exists on the upper surface (41A) of the base member (41) or not. <P>COPYRIGHT: (C)2012,JPO&INPIT |
