SAMPLE STAGE, AND MEASUREMENT, INSPECTION AND OBSERVATION APPARATUS INCLUDING SAMPLE STAGE

摘要

PROBLEM TO BE SOLVED: To provide a sample stage that stably performs positioning in high speed regardless of the presence of a dead band or the like.

SOLUTION: A sample stage comprises: a connection part by which connection between a table of the sample stage and a drive mechanism is capable of being divided mechanically; a control unit controlling the connection part so that the connection part is divided before stopping movement of the table by means of the drive mechanism; and a position detector detecting a table position. The control unit performs feedback control based on table position information from the position detector in coarse adjustment of the table. The control unit performs sequential control in which open control of the drive mechanism is performed using a preset velocity displacement pattern in fine adjustment.

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