| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a template with which a protrusion pattern of large area can be formed efficiently by NIL with high precision, and to provide a manufacturing method, a patterning method and a processing method. <P>SOLUTION: A template 10 is used in imprinting where a second irregular pattern consisting of a hardening agent is formed on a layer to be processed by filling a first irregular pattern with a hardening agent and then hardening the hardening agent thereby transferring the first irregular pattern to the hardening agent. The template 10 has the first irregular pattern on one surface side of a substrate. The first irregular pattern has two kinds or more of protrusions 11pa, 11pb having almost the same height position of the bottom of a recess and different heights from the bottom of a recess. <P>COPYRIGHT: (C)2012,JPO&INPIT |
