发明名称 |
SEMICONDUCTOR DEVICE, SEMICONDUCTOR PACKAGE, AND METHOD FOR PRODUCING EACH |
摘要 |
<p>Disclosed is a semiconductor device having an electrode (bonding pad) wherein a Cu wire bond join is possible having favorable initial bondability and high reliability. Further disclosed are a semiconductor package, and a method for producing each. The semiconductor device is provided with: an active element; an electrode (8) that has aluminum as the primary component and that is electrically connected to the abovementioned active element; and a stress relaxation membrane (6) that is disposed only in the center region of the abovementioned electrode (8) and that has mechanical strength that is at least that of copper. As a result, it is possible to reduce damage to the active element when bonding, and it is possible to favorably join a Cu wire, which is the bonding wire, to the electrode, which is the bonding pad.</p> |
申请公布号 |
WO2012005073(A1) |
申请公布日期 |
2012.01.12 |
申请号 |
WO2011JP63030 |
申请日期 |
2011.06.07 |
申请人 |
MITSUBISHI ELECTRIC CORPORATION;RENESAS ELECTRONICS CORPORATION;MAEDA, AKIRA;YAMADA, AKIRA;YAMAZAKI, KOJI;HORIBE, HIROSHI;HIROSE, TETSUYA |
发明人 |
MAEDA, AKIRA;YAMADA, AKIRA;YAMAZAKI, KOJI;HORIBE, HIROSHI;HIROSE, TETSUYA |
分类号 |
H01L21/60;H01L21/3205;H01L23/52 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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