| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitance type sensor that can further improve detection accuracy. <P>SOLUTION: A capacitance type sensor 1 includes insulating substrates 2 and 3, and a silicon substrate 4 joined to the insulating substrates 2 and 3. The silicon substrate 4 has a frame portion 40 joined to the insulating substrates 2 and 3, weight portions 5 and 6 in which recessed portions 53 and 63 opened in each one surface and solid portions 51 and 61 except for the recessed portions 53 and 63 are integrally formed, pairs of beam portions 9 and 10, and 11 and 12 for rotatably supporting the weight portions 5 and 6, and anchor portions 7 and 8 arranged to be separated from the frame portion 40. At least one beam portions 9 and 11 of the pairs of beam portions 9 and 10, and 11 and 12, are connected to the anchor portions 7 and 8. <P>COPYRIGHT: (C)2012,JPO&INPIT |
