| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a film manufacturing rate in a method for manufacturing a thin film using a spraying film forming method. <P>SOLUTION: A thin film forming method successively comprises a step (1) of spraying raw material solution achieved by dissolving and/or dispersing solute in solvent to form droplets, a step (2) of volatilizing the solvent in the droplets to condense, and a step (3) of depositing the condensed droplets on a substrate or on a thin film formed on a substrate. The step (2) successively includes at least a step of heating the droplets at a temperature of T<SB POS="POST">1</SB>°C to volatilize a part of the solvent in the droplets, a step of cooling to a temperature of T<SB POS="POST">2</SB>°C(T<SB POS="POST">2</SB><T<SB POS="POST">1</SB>) to liquefy at least a part of the volatilized solvent to remove at least a part of the volatilized solvent in the atmosphere, and a step of re-heating the droplets at a temperature of T<SB POS="POST">3</SB>°C(T<SB POS="POST">2</SB><T<SB POS="POST">3</SB>) to volatilize at least a part of the solvent in the droplets. <P>COPYRIGHT: (C)2012,JPO&INPIT |
