| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wire saw machine with a wire of a long lifetime, having a high machining accuracy and a high reliability. <P>SOLUTION: An ultrasonic vibrator 13 that joins an aluminum ultrasonic propagation body 12 is located approximately 1 mm spaced from a wire 2 of about 120 μm in diameter. Two rectangular holes 14 are provided in the ultrasonic propagation body 12, which is bonded with the ultrasonic vibrator 13 using epoxy adhesive. Additionally, a polyethylene top face plate 15 is bonded to the upper face of the ultrasonic propagation body 12 on a slurry or cutting fluid 11 side similarly using epoxy resin. In addition, a polyethylene side-face plate 16 is bonded to the side surface of the ultrasonic propagation body 12 also using epoxy resin. A feeding device 10 to feed the slurry or the cutting fluid 11 is located at a top position. The feeding device 10 is formed of a stainless steel pipe with a multitude of holes provided underside. <P>COPYRIGHT: (C)2012,JPO&INPIT |
