| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection device for highly precisely detecting a defect of a rotor-shaped measuring object having a surface with high reflectivity on the basis of a two dimensional image by photographing light reflected from the measuring object by irradiating a slit laser beam or the like to the rotor-shaped measuring object. <P>SOLUTION: The defect inspection device includes: a light source for irradiating slit light to a measuring object rotated or rectilinearly moved; a light receiving unit for receiving the light reflected from the measuring object and outputting a photographed two dimensional image; and defect detection means for detecting a defect of the measuring object according to whether or not the reflection light appears in a region except a region corresponding to the slit width on the basis of the two dimensional image. <P>COPYRIGHT: (C)2012,JPO&INPIT |
