| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid processing device which can accurately determine whether there is a discharge of a treatment liquid from a treatment liquid nozzle and whether there is a change in a discharge condition of a treatment liquid discharged from a treatment liquid nozzle. <P>SOLUTION: A liquid processing device which performs liquid processing by discharging an application liquid R supplied from a treatment liquid supply part 7 onto a surface of a substrate W includes: a nozzle 10 which forms a channel 10e for the treatment liquid; a light source 110 for irradiating a region between a tip 10d of the nozzle and a substrate surface W1 with light L; an imaging part 17 for imaging the region between the nozzle and the substrate surface; a control part 9a for outputting a discharge signal to discharge the treatment liquid from the nozzle to the substrate and for starting imaging by the imaging part; and a determination part 9b for determining whether there is a discharge of the treatment liquid from the nozzle and whether there is a change in a discharge condition of the treatment liquid discharged from the nozzle based on an imaging result which images brightness and darkness of the light which is entered to the treatment liquid discharged onto the substrate and reflected to the treatment liquid. <P>COPYRIGHT: (C)2012,JPO&INPIT |
