发明名称 |
ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJECTION EXPOSURE SYSTEM INCLUDING A MAGNET |
摘要 |
The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection. |
申请公布号 |
US2012008121(A1) |
申请公布日期 |
2012.01.12 |
申请号 |
US201113196592 |
申请日期 |
2011.08.02 |
申请人 |
WERBER ARMIN;MUEHLBERGER NORBERT;CZAP ALMUT;FISCHER JUERGEN;CARL ZEISS SMT GMBH |
发明人 |
WERBER ARMIN;MUEHLBERGER NORBERT;CZAP ALMUT;FISCHER JUERGEN |
分类号 |
G03B27/42;H01F7/00 |
主分类号 |
G03B27/42 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|