发明名称 METHOD AND SYSTEM FOR PREPARING A LAMELLA
摘要 PURPOSE: A method and system for preparing a lamellar are provided to divide a lamellar from a sample by placing a mask and the sample before an ion miller. CONSTITUTION: A manipulator(100) includes 2 individual subunits(110,120) The subunits are placed in a major rotational stage. A second sub unit manipulates a sample and a mask. A first sub unit manipulates a sample. A rotational stage(130) becomes separated with engines.
申请公布号 KR20120004332(A) 申请公布日期 2012.01.12
申请号 KR20110066050 申请日期 2011.07.04
申请人 CAMTEK LTD. 发明人 BOGUSLAVSKY DIMITRY;SMITH COLIN
分类号 H01J37/20;H01J37/26 主分类号 H01J37/20
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