| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a mold capable of easily obtaining a number of molds for imprinting. <P>SOLUTION: The method for manufacturing the mold includes: a primary mold forming process S1 which uses a master mold M0 on which a fine transfer pattern MA is formed and forms a primary mold M1 on which a fine transfer pattern MB is formed by using a metal; a spin-on glass substrate forming process S3 which provides a spin-on glass 5 on a substrate 3 and forms a spin-on glass-installed substrate 7; a spin-on glass transferring process S5 which presses the spin-on glass-installed substrate by the primary mold and transfers the fine transfer pattern formed on the primary mold on the spin-on glass provided on the spin-on glass-installed substrate; and a secondary mold forming process S7 which uses the spin-on glass-installed substrate on which the fine transfer pattern is transferred and forms a secondary mold M2 on which a fine transfer pattern MC is formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
