| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a continuous diffusion processing apparatus that can suppress occurrence of powder dust having an adverse effect on the processing quality of a target object when the target object is fed. <P>SOLUTION: A continuous diffusion processing apparatus has a feeding table 50 on which plural plate-like processing targets W are mounted, a barrel-type heating furnace 1 extending linearly from a feed-in portion for feeding in the feeding table 50 to a feed-out portion for feeding out the feeding table 50, a feeding device 2 for successively feeding the feeding table 50 into the heating furnace 1 and successively feeding out the feeding table 50 from the heating furnace 1, a heating device 3 for heating the processing targets W mounted on the feeding table 50 passing through the heating furnace 1 and a gas supply device 41 for supplying gas into the heating furnace 1 for diffusion processing. The feeding table 50 has a wheel portion 52 rolling along the bottom surface of the heating furnace 1 by a rolling bearing 60. <P>COPYRIGHT: (C)2012,JPO&INPIT |
