| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure the in-plane distribution of light elements in the vicinity of a sample surface in a non destructive manner and with a high space resolution. <P>SOLUTION: Ion beam 13 is made to be incident into a sample 10. Ion and particles discharged from the sample are detected 14 in synchronization with the incidence, i.e., the analysis of flying time is performed, thereby performing analysis of light elements (especially hydrogen, lithium) existing on a sample surface. The analysis results at each point on the sample surface is subject to mapping, thereby making the space distribution of elements targeted on the sample surface visible and shown. <P>COPYRIGHT: (C)2012,JPO&INPIT |
