| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic thin film which is operable in a high frequency band, and in which a high anisotropic magnetic field and ferromagnetic resonance frequency are acquired without using an after-the-fact process, and therewith, a ferromagnetic resonance half-value width is made to be narrow. <P>SOLUTION: A magnetic thin film 10 has a laminated granular film 12 where a granular layer 14 with a magnetic particle 18 wrapped by an insulator 16 and an insulating layer 20 are laminated alternately as a ferromagnetic layer, and is an exchange coupling film with an anti-ferromagnetic layer 22 formed on an outermost layer thereof. The high ferromagnetic resonance frequency is acquired because of increase in the anisotropic magnetic field associated with the exchange coupling magnetic field. Since a magnetic domain structure is made to be a single magnetic domain along with formation of the exchange coupling, an excitation process of an axis of hard magnetization becomes only uniform magnetization rotation, and increase in a ferromagnetic resonance line width associated with mixing of a magnetic wall movement magnetization process can be suppressed. Since the high anisotropic magnetic field and ferromagnetic resonance frequency are acquired by lamination of the anti-ferromagnetic layer 22 and optimization of a fine structure of the laminated granular film 12, after-the-fact processes, such as heat treatment and micro processing, are needless. <P>COPYRIGHT: (C)2012,JPO&INPIT |
