PIEZOELECTRIC DIFFRACTION GRATING, PROJECTOR, LIGHT EMITTING DEVICE AND DISPLAY DEVICE

摘要

Disclosed is a piezoelectric diffraction grating wherein the diffraction grating is formed using a piezoelectric film which can be moved at an extremely high speed and stopped. The piezoelectric diffraction grating is provided with: a first electrode (12) formed on a first insulating film (11); a piezoelectric film (13) formed on the first electrode; a second electrode (14) formed on the piezoelectric film; a second insulating film (15) formed on the second electrode and the piezoelectric film; and a mirror film (16) formed on the second insulating film. Recesses and protrusions are formed on the surface of the mirror film (16) by bending the piezoelectric film (13) by applying a voltage to the first electrode (12) and the second electrode (14), and an interference color is changed by reflecting light by the mirror film (16) having the recesses and protrusions formed thereon.