| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a parallelism adjusting mechanism of a probe card capable of acquiring an appropriate amount of overdrive and a stable probe mark, and using a versatile head plate. <P>SOLUTION: The parallelism adjusting mechanism of the probe card adjusts the parallelism between a probe card 12 and a wafer W on a wafer chuck 11, which is disposed thereunder, by lifting/lowering a head plate 15 at four positions out of four support columns 16 supporting the four corners of the head plate 15, and includes lifting/lowering mechanisms 17A interposed between the four support columns 16 and the head plate 15. The lifting/lowering mechanism 17A includes: a moving body 17C movably disposed along the upper face of the support column 16 and having a slope face; a lifting/lowering body 17E connected to the head plate 15 and disposed to lit/lower along the slope face of the moving body 17C; and a drive mechanism 17F moving the moving body 17C along the upper face of the support column 16. <P>COPYRIGHT: (C)2012,JPO&INPIT |
