| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for synthesizing homogeneous graphene and a carbon molecule thin film, by preparing metal crystal particles to act as a catalyst by using a common catalyst metal substrate, with ease and at a low cost. <P>SOLUTION: The method is carried out by loading the catalyst metal substrate 10 into an electric furnace 20 and heating until it becomes a prescribed temperature θ11 under the atmosphere of an inert gas and hydrogen gas (S100), forming graphene and the carbon molecule thin film on the substrate 10 by further supplying a carbon raw material gas during a prescribed time T11 while keeping the prescribed temperature θ11 (S110), and cooling the substrate 10 at a prescribed cool-down rate Δθ1 so as to lower a cooling velocity in comparison with that of natural cooling, particularly in a high-temperature region (S120); or by performing the processes S100-S120 after repeating one or more times of the following processes: loading the substrate 10 into the furnace 20, rising the temperature to a prescribed level under the atmosphere of an inert gas and hydrogen gas, keeping the temperature during a prescribed time and cooling the substrate at a prescribed cool-down rate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
