| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate conveying robot capable of preventing damaging of a substrate. <P>SOLUTION: The substrate conveying robot includes first and second pinion gears 32a and 32b engaged with first and second regulation gears 25a and 25b rotated by first and second driven arms 22a and 22b to be engaged with each other. A pinion rack 41 is held between the first and the second pinion gears 32a and 32b. In a state where a hand 23 moves inward from a radiation-direction outside to be positioned in a conveying room, the pinion gear rack 41 moves to the radiation-direction outside, and presses a substrate 15 via a buffer member to clamp the substrate 15. When the hand 23 moves to the radiation-direction outside to be positioned in a processing room, the pinion gear rack 41 moves to the radiation-direction inside to release the clamping. Since the substrate is clamped in the conveying room, high-speed movement is enabled. <P>COPYRIGHT: (C)2012,JPO&INPIT |
