| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern image of a sample with improved resolution with a simple device configuration. <P>SOLUTION: The image generation apparatus 1 includes: a laser light source 3 that emits a laser beam; a laser output control unit 11 that modulates the intensity of the laser beam; a laser scanner 5 that scans a position on an object A to be measured irradiated with the laser beam; a modulation pattern control unit 15 that performs control to irradiate the object A with light beams of a plurality of spatial modulation patterns; an electric signal detector 7 that detects an electric signal generated from the object A in accordance with irradiation of the light beams of the plurality of spatial modulation patterns; an electric signal image forming unit 17 that generates a two-dimensional feature image including feature distribution information formed by associating illumination position information on the irradiation position of the light beams and feature information on the feature of the detected signal; and an image data calculation unit 19 that generates a pattern image of the object A on the basis of the feature images generated in accordance with the plurality of spatial modulation patterns. <P>COPYRIGHT: (C)2012,JPO&INPIT |
