发明名称 |
PRECISE TEMPERATURE CONTROL FOR TEOS APPLICATION BY HEAT TRANSFER FLUID |
摘要 |
Embodiments of the invention generally provide a mixing block for mixing precursors and/or cleaning agent which has the advantage of maintaining the temperature and improving the mixing effect of the precursors, cleaning agent or the mixture thereof to eliminate the substrate-to-substrate variation, thereby providing improved process uniformity. |
申请公布号 |
US2012009347(A1) |
申请公布日期 |
2012.01.12 |
申请号 |
US20100831731 |
申请日期 |
2010.07.07 |
申请人 |
LEE DONGSUH;WANG WEIJIE;STERLING WILLIAM N.;KIM SAM H.;CHOI SOO YOUNG;PARK BEOM SOO;KIM BEOM SOO;WANG QUNHUA;APPLIED MATERIALS, INC. |
发明人 |
LEE DONGSUH;WANG WEIJIE;STERLING WILLIAM N.;KIM SAM H.;CHOI SOO YOUNG;PARK BEOM SOO;KIM BEOM SOO;WANG QUNHUA |
分类号 |
C23C16/52;B01F15/02;B01F15/06;C23C16/00 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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