摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel transparent conductive film using a material which can be stably supplied at low cost and has less toxicity; a method for manufacturing the same; a dye-sensitized solar battery having the same; and a solid electrolyte battery having the same. <P>SOLUTION: There is provided a transparent conductive film formed in a nitrogen-contained atmosphere, using Li<SB POS="POST">4</SB>Ti<SB POS="POST">5</SB>O<SB POS="POST">12</SB>as a target, by a spattering method. The transparent conductive film is a novel transparent conductive film having transparency, which contains Li, Ti, O, and N and has a TiN-type crystal structure. <P>COPYRIGHT: (C)2012,JPO&INPIT |