| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a pattern having more excellent resolution and focus margin (DOF). <P>SOLUTION: This salt is represented by formula (I). [In the formula, Q<SP POS="POST">1</SP>and Q<SP POS="POST">2</SP>mutually independently represent a fluorine atom or a 1-6C perfluoroalkyl group; L<SP POS="POST">1</SP>represents *-CO-O-L<SP POS="POST">a</SP>- or *-CH<SB POS="POST">2</SB>-O-L<SP POS="POST">b</SP>-, * represents a bond with -C(Q<SP POS="POST">1</SP>)(Q<SP POS="POST">2</SP>)-, L<SP POS="POST">a</SP>and L<SP POS="POST">b</SP>mutually independently represent a bivalent 1-15C saturated hydrocarbon group, and -CH<SB POS="POST">2</SB>- contained in the bivalent saturated hydrocarbon group may be substituted by -O-, or -CO-; W<SP POS="POST">1</SP>represents 2-36C heterocyclic ring, and -CH<SB POS="POST">2</SB>- contained in the heterocyclic ring may be substituted by -O-; and Z<SP POS="POST">1+</SP>represents an organic counter ion]. <P>COPYRIGHT: (C)2012,JPO&INPIT |
