| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resistivity measurement apparatus, capable of easily control the movement and the moving speed of a four-point probe. <P>SOLUTION: The resistivity measurement apparatus includes: a measurement stage for loading a sample thereon; the four-point probe; a motor having a rotation axis; an eccentric cam connected to the rotation axis of the motor; a holding body for holding the four-point probe, and with the followed movement of the eccentric cam rotation, for moving the four-point probe to the approaching side to and the apart side from the measurement stage; and a control unit for controlling the movement and the moving speed of the four-point probe by the rotation and the rotation speed of the motor. <P>COPYRIGHT: (C)2012,JPO&INPIT |
