发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same which contributes to reduction in output capacity Coss through reduction in capacity Cdsub between a drain and a substrate. <P>SOLUTION: The lateral MOSFET comprises an SOI substrate provided with a semiconductor substrate and a first conductive type semiconductor layer formed on the semiconductor substrate via an insulation film, a well of a second conductive type semiconductor layer formed in an active region of the first conductive type semiconductor layer and a source/drain region of the first conductive type semiconductor layer formed in the well and the active region. At least a part of the active region under a drain pad formation region 9p that is formed to contact with the drain region, includes an insulative region 11 formed to reach the insulation film on the SOI substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012009557(A) 申请公布日期 2012.01.12
申请号 JP20100142909 申请日期 2010.06.23
申请人 PANASONIC ELECTRIC WORKS CO LTD 发明人 SUNADA TAKUYA;WAKEGI YU
分类号 H01L29/786;H01L21/312;H01L21/316;H01L21/768;H01L23/522 主分类号 H01L29/786
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