| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a spectrum with high accuracy and high reproducibility by improving accuracy of fixed mirror attitude control by the dynamic alignment system and constant speed control of a moving mirror by feedback control, regardless of lapse of time after lighting infrared light source or the like. <P>SOLUTION: A storage part 28 stores a table in which control parameters such as a phase difference of signals used for control at a fixed mirror attitude control part 21 and a transfer function used for control at a moving mirror speed control part 24 are prepared for each temperature range in an interferometer chamber. When measurement is carried out, a parameter setting part 26 reads temperature information in the interferometer chamber detected by a temperature sensor 27, reads out the control parameter values corresponding to the temperature from the storage part 28, transmits the control parameter values to the respective control parts 21 and 24, and measurement is performed. Thus, appropriate interferometer control is carried out regardless of a temperature in the interferometer chamber. <P>COPYRIGHT: (C)2012,JPO&INPIT |
