| 摘要 |
A backside illuminated (BSI) image sensor including a substrate, a plurality of photosensitive regions, a back-end-of-line (BEOL), a pad, a color filter array, a plurality of micro-lenses and a protection layer is provided. The substrate has a first surface and a second surface. The substrate has a pad opening therein through the first surface and the second surface. The photosensitive regions are disposed in the substrate. The BEOL is disposed on the first surface of the substrate. The pad is disposed in the BEOL and exposed by the pad opening. The color filter array is disposed on the second surface of the substrate. The micro-lenses are disposed on the color filter array. The protection layer at least covers the top corner and the sidewall of the pad opening. |
