| 摘要 |
A system for cooling at least one singulation saw used to singulate components from a substrate. The system is comprised of a coolant loop having at one or more coolant delivery means, a coolant collection means, one or more recycle tanks for contaminate particles to settle out of the captured coolant, a mixing tank configured after the recycle tanks within the loop to produce and replace lost coolant, and a means to cool the coolant. The system can all so include filters within the loop to remove particles not removed by the settling tank. Further, the system is able to be configured with a holding tank configured to prevent any bubbles from getting to the coolant delivery means. |
