| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric film which can ensure driving durability in humid by reducing the amount of lead in the film, and to provide a piezoelectric element and a liquid discharge device. <P>SOLUTION: The piezoelectric film has a columnar crystal structure consisting of many columnar crystals, and principally comprises a perovskite oxide represented by formula (P). Pb<SB POS="POST">a</SB>A<SB POS="POST">b</SB>[(Zr<SB POS="POST">c</SB>Ti<SB POS="POST">1-c</SB>)<SB POS="POST">1-d</SB>B<SB POS="POST">d</SB>]O<SB POS="POST">e</SB>...(P)(In the formula, Pb, and A are A site elements, Zr, Ti and B are B site elements. a: amount of lead, b: doping amount of A site, c: Zr/Ti ratio, d: doping amount of B site, e: amount of oxygen, and a<1, a+b>1, 0<d<b. e=3 in standard, but it may deviate from the reference value in a range where a perovskite structure can be taken). <P>COPYRIGHT: (C)2012,JPO&INPIT |
