| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating liquid for an element separation material or the like, capable of forming an element separation layer having high breakdown voltage. <P>SOLUTION: The coating liquid for an element separation material comprises: a polysilazane or the like having a skeleton comprising a structural unit represented by general formula (I); a compound containing a metal element capable of forming an oxide; and a solvent. The metal element is titanium, zirconium, hafnium or tantalum, and is added to be 0.5-19 mol% relative to a molar number of Si of the polysilazane or the like. <P>COPYRIGHT: (C)2012,JPO&INPIT |
