发明名称 |
Substrate support for transporting disk-shaped substrates in vacuum coating systems, comprises recording plane for substrate, transport plane for supporting substrate support on transport device of vacuum deposition system, and webs |
摘要 |
<p>The substrate support (1) comprises a recording plane for a substrate (2), a transport plane (4) for supporting the substrate support on a transport device (5) of a vacuum deposition system, and webs (6) arranged between the recording plane and the transport plane, The webs: comprise web sides extending between the recording plane and the transport plane, a recording-side narrow side lying parallel to the recording plane, and a transport-side narrow side lying parallel to the transport plane; and are connected between the recording plane and the transport plane to form a honeycomb structure. The substrate support (1) comprises a recording plane for a substrate (2), a transport plane (4) for supporting the substrate support on a transport device (5) of a vacuum deposition system, and webs (6) arranged between the recording plane and the transport plane, The webs: comprise web sides extending between the recording plane and the transport plane, a recording-side narrow side lying parallel to the recording plane, and a transport-side narrow side lying parallel to the transport plane; are connected between the recording plane and the transport plane to form a honeycomb structure; and exhibit a material transparent to infrared radiation. The narrow sides have a smaller width than the web sides. The ratio of the width of the narrow sides to the width of the web sides is 1:10-1:30. The honeycomb of the honeycomb structure is formed in rectangular, hexagonal, or rhomboid form.</p> |
申请公布号 |
DE102010031262(A1) |
申请公布日期 |
2012.01.12 |
申请号 |
DE20101031262 |
申请日期 |
2010.07.12 |
申请人 |
VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
DSAAK, TORSTEN;MOSSHAMMER, STEFFEN;OBST, HENRIK, DR.;KILIAN, MICHAEL |
分类号 |
C23C14/56 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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